Silicon anodization as a structuring technique : literature review, modeling and experiments / Alexey Ivanov.

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Silicon anodization as a structuring technique : literature review, modeling and experiments / Alexey Ivanov.

9783658192389 (electronic book)
3658192380 (electronic book)
3658192372
9783658192372

Wiesbaden, Germany : Springer Vieweg, [2018]

English

1 online resource.

10.1007/978-3-658-19238-9 doi

QD273

541/.393

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​

Includes bibliographical references.

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Print version: 9783658192372

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