@article{827160,
      author = {Shim, Seongbo, and Shin, Youngsoo,},
      url = {http://library.usi.edu/record/827160},
      title = {Physical design and mask synthesis for directed  self-assembly lithography /},
      abstract = {This book discusses physical design and mask synthesis of  directed self-assembly lithography (DSAL). It covers the  basic background of DSAL technology, physical design  optimizations such as placement and redundant via  insertion, and DSAL mask synthesis as well as its  verification. Directed self-assembly lithography (DSAL) is  a highly promising patterning solution in sub-7nm  technology.},
      doi = {https://doi.org/10.1007/978-3-319-76294-4},
      recid = {827160},
      pages = {1 online resource (xiv, 138 pages) :},
}