TY  - GEN
AU  - Bhattacharyya, Bijoy,
CN  - TJ1191.5
ID  - 853302
KW  - Micromachining.
KW  - Nanotechnology.
KW  - Microelectromechanical systems.
LK  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=2012265
SN  - 9780323352888 
T1  - Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
TI  - Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
UR  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=2012265
ER  -