Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
2015
TJ1191.5 .B438 2015
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Title
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
ISBN
9780323327374
9780323352888 (electronic book)
9780323352888 (electronic book)
Published
Amsterdam, [Netherlands] : William Andrew, 2015.
Copyright
©2015
Language
English
Description
1 online resource (297 pages) : illustrations.
Call Number
TJ1191.5 .B438 2015
Dewey Decimal Classification
671.35
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (viewed April 24, 2015).
Series
Micro & nano technologies.
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