TY  - GEN
T1  - Capacitive silicon resonators :performance enhancement methods /
AU  - Toan, Nguyen Van,
AU  - Ono, Takahito,
CN  - TK7872.D53
ID  - 898152
KW  - Dielectric resonators.
KW  - Electric resonators.
KW  - Nanoelectromechanical systems.
KW  - Semiconductors.
SN  - 9780429556524
SN  - 0429556527
TI  - Capacitive silicon resonators :performance enhancement methods /
LK  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=5813665
UR  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=5813665
ER  -