000898152 000__ 01772cam\a22004331i\4500 000898152 001__ 898152 000898152 005__ 20210515175706.0 000898152 006__ m\\\\\o\\d\\\\\\\\ 000898152 007__ cr\un\nnnunnun 000898152 008__ 190901s2020\\\\flua\\\\ob\\\\001\0\eng\d 000898152 020__ $$a9780429556524$$q(electronic book) 000898152 020__ $$a0429556527$$q(electronic book) 000898152 020__ $$z9780367217761 000898152 020__ $$z0367217767 000898152 035__ $$a(NhCcYBP)EBC5813665 000898152 040__ $$aNhCcYBP$$cNhCcYBP 000898152 050_4 $$aTK7872.D53$$bT63 2020 000898152 08204 $$a621.3815$$223 000898152 1001_ $$aToan, Nguyen Van,$$eauthor. 000898152 24510 $$aCapacitive silicon resonators :$$bperformance enhancement methods /$$cNguyen Van Toan and Takahito Ono. 000898152 264_1 $$aBoca Raton, FL :$$bCRC Press/Taylor & Francis Group,$$c[2020] 000898152 300__ $$a1 online resource (xiii, 161 pages.) 000898152 336__ $$atext$$btxt$$2rdacontent 000898152 337__ $$acomputer$$bc$$2rdamedia 000898152 338__ $$aonline resource$$bcr$$2rdacarrier 000898152 504__ $$aIncludes bibliographical references and index. 000898152 506__ $$aAccess limited to authorized users 000898152 533__ $$aElectronic reproduction.$$bAnn Arbor, MI$$nAvailable via World Wide Web. 000898152 588__ $$aDescription based on print version record. 000898152 650_0 $$aDielectric resonators. 000898152 650_0 $$aElectric resonators. 000898152 650_0 $$aNanoelectromechanical systems. 000898152 650_0 $$aSemiconductors. 000898152 7001_ $$aOno, Takahito,$$eauthor. 000898152 7102_ $$aProQuest (Firm) 000898152 77608 $$iPrint version:$$aToan, Nguyen Van.$$tCapacitive silicon resonators.$$dBoca Raton, FL : CRC Press/Taylor & Francis Group, [2020]$$z9780367217761$$z0367217767$$w(DLC) 2019010375 000898152 852__ $$bebk 000898152 85640 $$3GOBI DDA$$uhttps://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=5813665$$zOnline Access 000898152 909CO $$ooai:library.usi.edu:898152$$pGLOBAL_SET 000898152 980__ $$aEBOOK 000898152 980__ $$aBIB 000898152 982__ $$aEbook 000898152 983__ $$aOnline