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Table of Contents
Introduction
Characterization, Experimental Challenges
Advanced Characterization
Characterization of Nanoscale Devices
Statistical Properties/Variability
Theoretical Understanding
Possible Defects: Experimental
Possible Defects: First Principles
Modeling
Technological Impact
Silicon dioxides/SiON
High-k oxides
Alternative technologies
Circuits.
Characterization, Experimental Challenges
Advanced Characterization
Characterization of Nanoscale Devices
Statistical Properties/Variability
Theoretical Understanding
Possible Defects: Experimental
Possible Defects: First Principles
Modeling
Technological Impact
Silicon dioxides/SiON
High-k oxides
Alternative technologies
Circuits.