@article{898944,
      recid = {898944},
      author = {Pelleg, Joshua,},
      title = {Mechanical properties of silicon based compounds :  silicides /},
      pages = {1 online resource.},
      abstract = {This book focuses on the mechanical properties of  silicides for very large scale integration (VLSI)  applications. It presents the fabrication process for bulk  silicides and thin films, and list complete testing  deformation for a variety of silicon based compounds. The  author also presents dislocation in silicides, fatigue and  fracture aspects. A special chapter is given on deformation  in silicides in the nano scale. Composites and alloys are  also considered.},
      url = {http://library.usi.edu/record/898944},
}