@article{905824, recid = {905824}, author = {Whitehouse, D. J. and Whitehouse, D. J.}, title = {Handbook of surface and nanometrology [electronic resource] /}, publisher = {CRC Press,}, address = {Boca Raton, FL :}, pages = {xxiii, 975 p. :}, year = {2011}, note = {Rev. ed. of: Handbook of surface metrology. c1994.}, url = {http://library.usi.edu/record/905824}, }