TY  - GEN
AU  - Kim, Seong H.
AU  - Dugger, M. T.
AU  - Mittal, K. L.,
CN  - TK7875
CY  - Leiden [Netherlands] ;
CY  - Boston :
DA  - 2010.
ID  - 909367
KW  - Microelectromechanical systems.
KW  - Nanoelectromechanical systems.
KW  - Adhesion.
KW  - Surfaces (Technology)
LK  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=1109848
PB  - VSP,
PP  - Leiden [Netherlands] ;
PP  - Boston :
PY  - 2010.
T1  - Adhesion aspects in MEMS/NEMS
TI  - Adhesion aspects in MEMS/NEMS
UR  - https://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=1109848
ER  -