@article{911390,
      recid = {911390},
      author = {Madou, Marc J.,},
      title = {Fundamentals of microfabrication and nanotechnology. from  MEMS to bio-MEMS and bio-NEMS : manufacturing techniques  and applications /, Volume III :},
      pages = {1 online resource (642 pages) :},
      url = {http://library.usi.edu/record/911390},
}