000911390 000__ 01887cam\a2200433\i\4500
000911390 001__ 911390
000911390 005__ 20210515183410.0
000911390 006__ m\\\\\o\\d\\\\\\\\
000911390 007__ cr\cn\nnnunnun
000911390 008__ 160718t20112011flua\\\\ob\\\\000\0\eng\d
000911390 020__ $$z9781420055160
000911390 020__ $$a9781439895245 $$q(electronic book)
000911390 035__ $$a(MiAaPQ)EBC1446478
000911390 035__ $$a(Au-PeEL)EBL1446478
000911390 035__ $$a(CaPaEBR)ebr11166029
000911390 035__ $$a(OCoLC)908077533
000911390 040__ $$aMiAaPQ$$beng$$erda$$epn$$cMiAaPQ$$dMiAaPQ
000911390 050_4 $$aTK7875$$b.M336 2011
000911390 0820_ $$a620.5$$223
000911390 1001_ $$aMadou, Marc J.,$$eauthor.
000911390 24510 $$aFundamentals of microfabrication and nanotechnology.$$nVolume III :$$bfrom MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications /$$cMarc J. Madou.
000911390 250__ $$aThird edition.
000911390 264_1 $$aBoca Raton, Florida ;$$aLondon, [England] ;$$aNew York :$$bCRC Press,$$c2011.
000911390 264_4 $$c©2011
000911390 300__ $$a1 online resource (642 pages) :$$billustrations, tables
000911390 336__ $$atext$$2rdacontent
000911390 337__ $$acomputer$$2rdamedia
000911390 338__ $$aonline resource$$2rdacarrier
000911390 504__ $$aIncludes bibliographical references.
000911390 506__ $$aAccess limited to authorized users.
000911390 588__ $$aDescription based on print version record.
000911390 650_0 $$aMicroelectromechanical systems.
000911390 650_0 $$aNanoelectromechanical systems.
000911390 650_0 $$aMicrofluidics.
000911390 650_0 $$aSolid state physics.
000911390 77608 $$iPrint version:$$aMadou, Marc J.$$tFundamentals of microfabrication and nanotechnology. Volume III.$$bThird edition.$$dBoca Raton, Florida ; London, [England] ; New York : CRC Press, c2011 $$hxiii, 626 pages $$z9781420055160 $$w2011014406
000911390 852__ $$bebk
000911390 85640 $$3ProQuest Ebook Central Academic Complete$$uhttps://univsouthin.idm.oclc.org/login?url=https://ebookcentral.proquest.com/lib/usiricelib-ebooks/detail.action?docID=1446478$$zOnline Access
000911390 909CO $$ooai:library.usi.edu:911390$$pGLOBAL_SET
000911390 980__ $$aEBOOK
000911390 980__ $$aBIB
000911390 982__ $$aEbook
000911390 983__ $$aOnline