Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
2015
TK7875 .H363 2015
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Details
Title
Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others].
Edition
Second edition.
ISBN
9780323299657
9780323312233 (electronic book)
9780323312233 (electronic book)
Published
Amsterdam, [Netherlands] : William Andrew, 2015.
Copyright
©2015
Language
English
Description
1 online resource (827 pages) : illustrations, photographs.
Call Number
TK7875 .H363 2015
Dewey Decimal Classification
621.381
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
Added Author
Series
Micro & nano technologies.
Available in Other Form
Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, c2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657
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