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000913126 019__ $$a1111974039$$a1117281598$$a1117698896
000913126 020__ $$a9783030156121$$q(electronic book)
000913126 020__ $$a3030156125$$q(electronic book)
000913126 020__ $$z3030156117
000913126 020__ $$z9783030156114
000913126 0247_ $$a10.1007/978-3-030-15
000913126 035__ $$aSP(OCoLC)on1111703112
000913126 035__ $$aSP(OCoLC)1111703112$$z(OCoLC)1111974039$$z(OCoLC)1117281598$$z(OCoLC)1117698896
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000913126 049__ $$aISEA
000913126 050_4 $$aQH212.A78
000913126 08204 $$a502.81$$223
000913126 24500 $$aElectrical atomic force microscopy for nanoelectronics /$$cUmberto Celano, editor.
000913126 264_1 $$aCham, Switzerland :$$bSpringer,$$c[2019]
000913126 300__ $$a1 online resource
000913126 336__ $$atext$$btxt$$2rdacontent
000913126 337__ $$acomputer$$bc$$2rdamedia
000913126 338__ $$aonline resource$$bcr$$2rdacarrier
000913126 4901_ $$aNanoScience and technology,$$x2197-7127
000913126 504__ $$aIncludes bibliographical references.
000913126 5050_ $$aIntroduction (U. Celano, W. Vandervorst) -- Conductive AFM for nanoscale analysis of high-k dielectric metal oxides (C. Rodenbücher, M. Wojtyniak, K. Szot) -- Mapping Conductance and Carrier Distribution in Confined Three-Dimensional Transistor Structures (A. Schulze, P. Eyben, K. Paredis, L. Wouters, U. Celano, W. Vandervorst) -- Scanning Capacitance Microscopy for two-dimensional carrier profiling of semiconductor devices (J. Mody, J. Nxumalo) -- Scanning probe lithography for nanopatterning and fabrication of high-resolution devices (Y. K. Ryu, A. W. Knoll) -- Characterizing Ferroelectricity with an Atomic Force Microscopy: an all-around technique (S. Martin, B. Gautier, N. Baboux, A. Gruvermann, A. Carretero-Genevrier, M. Gich, A. Gomez) -- Electrical AFM for the analysis of Resistive Switching (S. Brivio, J. Frascaroli, M. H. Lee) -- Magnetic force microscopy for magnetic recording and devices (A. Hirohata, M. Samiepour, M. Corbetta) -- Nanoscale space charge density profiling with KPFM and photoconductive C-AFM/KPFM (C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre) -- Electrical AFM of 2D materials and heterostructures for nanoelectronics (F. Giannazzo, G. Greco, F. Roccaforte, C. Mahata, M. Lanza) -- Diamond probes technology (T. Hantschel, T. Conard, J. Kilpatrick, G. Cross) -- Scanning Microwave Impedance Microscopy (sMIM) in electronic materials and quantum materials (K. Rubin, Y. Yang, O. Amster, D. Scrymgeour, S. Misra).
000913126 506__ $$aAccess limited to authorized users.
000913126 520__ $$aThe tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
000913126 588__ $$aOnline resource; title from PDF title page (SpringerLink, viewed August 29, 2019).
000913126 650_0 $$aAtomic force microscopy.
000913126 650_0 $$aNanoelectronics.
000913126 7001_ $$aCelano, Umberto,$$eeditor.
000913126 77608 $$iPrint version: $$z3030156117$$z9783030156114$$w(OCoLC)1085950233
000913126 830_0 $$aNanoscience and technology.
000913126 852__ $$bebk
000913126 85640 $$3SpringerLink$$uhttps://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-030-15612-1$$zOnline Access$$91397441.1
000913126 909CO $$ooai:library.usi.edu:913126$$pGLOBAL_SET
000913126 980__ $$aEBOOK
000913126 980__ $$aBIB
000913126 982__ $$aEbook
000913126 983__ $$aOnline
000913126 994__ $$a92$$bISE