@article{914811,
      note = {"Doctoral thesis accepted by Chinese Academy of Sciences,  Beijing, China."},
      author = {Wang, Guilei.},
      url = {http://library.usi.edu/record/914811},
      title = {Investigation on SiGe selective epitaxy for source and  drain engineering in 22 nm CMOS technology node and beyond  /},
      publisher = {Springer,},
      recid = {914811},
      pages = {1 online resource},
      address = {Singapore :},
      year = {2020},
}