DIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs / by Deborah Munro.

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DIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs / by Deborah Munro.

9783030330736
3030330737
9783030330729

Cham : Springer, 2019.

English

1 online resource (xvi, 188 pages) : illustrations.

10.1007/978-3-030-33

TK7875

621.3815

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.

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