TY - GEN AU - Quinten, Michael, CN - QC367 ID - 924843 KW - Optical measurements. LK - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-030-29454-0 SN - 9783030294540 SN - 3030294544 T1 - A practical guide to surface metrology / TI - A practical guide to surface metrology / UR - https://univsouthin.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-3-030-29454-0 ER -