Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
2013
QC176.83 .M48 2013
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Title
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
ISBN
9781608051564 (e-book)
9781608051571
9781608051571
Published
Sharjah, United Arab Emirates ; Oak Park, Illinois : Bentham Science Publishers, [2013]
Copyright
©2013
Language
English
Description
1 online resource (363 pages)
Call Number
QC176.83 .M48 2013
Bibliography, etc. Note
Includes bibliographical references and indexes.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed September 20, 2013).
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