Advanced MEMS/NEMS fabrication and sensors / Zhuoqing Yang, editor.
Yang, Zhuoqing, editor.
2022
TK7875
Available Online

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Title Advanced MEMS/NEMS fabrication and sensors / Zhuoqing Yang, editor.
ISBN 9783030797492 (electronic bk.)
303079749X (electronic bk.)
3030797481
9783030797485
DOI https://doi.org/10.1007/978-3-030-79749-2
Publication Details Cham, Switzerland : Springer, [2022]
Language English
Description 1 online resource
Item Number 10.1007/978-3-030-79749-2 doi
Call Number TK7875
Dewey Decimal Classification 621.381
Summary This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
Note Includes index.
Access Note Access limited to authorized users.
Digital File Characteristics text file
PDF
Source of Description Online resource; title from PDF title page (SpringerLink, viewed October 26, 2021).
Added Author Yang, Zhuoqing, editor.
Available in Other Form Print version: 9783030797485
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