Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
1992
TK7836 .N37 1992eb
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Title
Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Corporate Author
ISBN
0309046351
Publication Details
Washington, D.C. : National Academy Press, 1992.
Language
English
Description
xii, 89 p. : ill ; 28 cm.
Call Number
TK7836 .N37 1992eb
Dewey Decimal Classification
621.381
Note
"NMAB-461."
Bibliography, etc. Note
Includes bibliographical references.
Access Note
Access limited to authorized users.
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