Helium ion microscopy / Gregor Hlawacek, Armin Gölzhäuser, editors.
2016
QH212.F5
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Unlimited
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Can lend chapters, not whole ebooks
Details
Title
Helium ion microscopy / Gregor Hlawacek, Armin Gölzhäuser, editors.
ISBN
9783319419909 (electronic book)
3319419900 (electronic book)
9783319419886
3319419900 (electronic book)
9783319419886
Published
Switzerland : Springer, 2016.
Language
English
Description
1 online resource (xxiii, 526 pages) : illustrations.
Item Number
10.1007/978-3-319-41990-9 doi
Call Number
QH212.F5
Dewey Decimal Classification
578.1
Summary
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Online resource; title from PDF title page (SpringerLink, viewed October 13, 2016).
Added Author
Hlawacek, Gregor, editor.
Gölzhäuser, Armin, editor.
Gölzhäuser, Armin, editor.
Series
Nanoscience and technology.
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Online Access
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