Piezoelectric MEMS resonators / Harmeet Bhugra, Gianluca Piazza, editors.
Bhugra, Harmeet, editor.; Piazza, Gianluca, editor.
2017
TK7875
Available Online

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Title Piezoelectric MEMS resonators / Harmeet Bhugra, Gianluca Piazza, editors.
ISBN 9783319286884 (electronic book)
3319286889 (electronic book)
9783319286860
3319286862
Published Cham, Switzerland : Springer Nature, [2017]
Copyright ©2017
Language English
Description 1 online resource (424 pages) : illustrations
Call Number TK7875
Dewey Decimal Classification 621.381
Summary "This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers"--Provided by publisher.
Bibliography, etc. Note Includes bibliographical references and index.
Access Note Access limited to authorized users.
Source of Description Description based on print version record.
Added Author Bhugra, Harmeet, editor.
Piazza, Gianluca, editor.
Series Microsystems and nanosystems.
Available in Other Form Piezoelectric mems resonators.
Linked Resources Online Access
Record Appears in Online Resources > Ebooks
All Resources
AIN Thin Film Processing and Basic Properties
Lead Zirconate Titanate (PZT) for M/NEMS
Gallium Nitride for M/NEMS
Lithium Niobate for M/NEMS Resonators
Quality Factor and Coupling in Piezoelectric MEMS Resonators
Flexural Piezoelectric Resonators
Laterally Vibrating Piezoelectric MEMS Resonators
BAW Piezoelectric Resonators
Shear Piezoelectric MEMS Resonators
Temperature Compensation of Piezo-MEMS Resonators
Computational Modeling Challenges
Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators
Reliability and Quality Assessment (Stability and Packages)
Large Volume Testing and Calibration
High Frequency Oscillators for Mobile Devices
BAW Filters and Duplexers for Mobile Communication.

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