Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
1992
TK7836 .N37 1992 (Mapit)
Available at General Collection
Items
Details
Title
Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Corporate Author
ISBN
0309046351
Publication Details
Washington, D.C. : National Academy Press, 1992.
Language
English
Description
xii, 89 p. : ill ; 28 cm.
Call Number
TK7836 .N37 1992
Dewey Decimal Classification
621.381
Note
"NMAB-461."
Bibliography, etc. Note
Includes bibliographical references.
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