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Dry etching technology for semiconductors [electronic resource] / Kazuo Nojiri.

9783319102955 electronic book
3319102958 electronic book
9783319102948

Cham : Springer, [2014]

©2015

English

1 online resource (xiii, 116 pages) : illustrations

TA2020

621.044

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes.

"Based on translation from the Japanese language edition: Hajimete no handotai dry etching gijutsu by Kazuo Nojiri."

Includes bibliographical references.

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Online resource; title from PDF title page (SpringerLink, viewed November 10, 2014).

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