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Supervisor's Foreword; Abstract; Acknowledgments; Contents; Abbreviations; 1 Introduction; Abstract ; 1.1 Micro-Nanohierarchical Structures in Nature; 1.2 Artificial Micro-Nanohierarchical Structures; 1.2.1 The Progress of Bottom-Up Method; 1.2.2 The Progress of Top-Down Method; 1.3 The Development Progress of Microenergy Field; 1.3.1 Microenergy Technology; 1.3.2 Nanogenerator; 1.3.3 Triboelectric Nanogenerator; 1.4 Research Purpose and Content; 1.4.1 Research Purpose; 1.4.2 Research Content; References; 2 Micro-Nanointegrated Fabrication Technique for Silicon; Abstract.
2.1 Nanoforest Fabrication Based on an Improved DRIE Process2.1.1 Deep Reactive-Ion Etching (DRIE) Process; 2.1.2 Nanostructuring by an Improved DRIE Process; 2.1.3 Mechanism of Controllable Formation of Nanostructures; 2.2 Fabrication of Si-based Micro-Nanohierarchical Structures; 2.2.1 Structural Design; 2.2.2 Fabrication Process; 2.2.3 Characterization and Analysis of Micro-NanoHierarchical Structures; 2.3 Interaction of Multiscale Structures Based on Silicon; 2.4 Properties of Si-Based Micro-NanoHierarchical Structures; 2.4.1 Anti-reflective Property; 2.4.2 Super-hydrophobic Property.
2.5 ConclusionsReferences; 3 Micro-Nanointegrated Fabrication Technique for Flexible Materials; Abstract ; 3.1 Replication Process and Surface-Energy Control; 3.1.1 Replication Process Based on Silicon Mold; 3.1.2 Controllable Fabrication of Ultra-Low-Surface-Energy Silicon Mold; 3.2 Micro-Nanohierarchical Structures Based on PDMS; 3.2.1 Brief Introduction of PDMS; 3.2.2 Single-Step Fabrication of Micro-Nanohierarchical Structures on PDMS; 3.2.3 Key Factors of Single-Step Replication Process; 3.2.4 Effect of Process Parameters on Surface Properties of PDMS.
3.3 Micro-Nanohierarchical Structures Based on Parylene-C3.3.1 Fabrication and Method; 3.3.2 The Properties of Fabricated MNHS Parylene-C Films; 3.4 The Interaction of Multiscale Structures on Flexible Materials; 3.5 The Surface Modification Based on Post-DRIE Process; 3.5.1 Fluorocarbon Plasma Treatment Based on Post-DRIE Process; 3.5.2 The Mechanism of Enhancing Hydrophobicity by Using Post-DRIE Process; 3.6 Conclusions; References; 4 Flexible Triboelectric Nanogenerators: Principle and Fabrication; Abstract ; 4.1 Working Principle of TENG; 4.2 Design of Flexible Sandwich-Shaped TENG.
4.2.1 Structural Geometry and Surface Profile4.2.2 Theoretical Analysis; 4.2.3 Finite Element Simulation; 4.3 Fabrication of the Sandwich-Shaped TENG; 4.4 Electric Properties Test and Analysis of the Sandwich-Shaped TENG; 4.4.1 Test System and Brief Results; 4.4.2 Frequency Effect of External Force on TENG; 4.4.3 Structural Effect on TENG; 4.4.4 Powering Ability for Practical Applications; 4.5 Conclusions; References; 5 Flexible Triboelectric Nanogenerators: Enhancement and Applications; Abstract ; 5.1 Enhancement of TENG Based on Single-Step Fluorocarbon Plasma Treatment.
2.1 Nanoforest Fabrication Based on an Improved DRIE Process2.1.1 Deep Reactive-Ion Etching (DRIE) Process; 2.1.2 Nanostructuring by an Improved DRIE Process; 2.1.3 Mechanism of Controllable Formation of Nanostructures; 2.2 Fabrication of Si-based Micro-Nanohierarchical Structures; 2.2.1 Structural Design; 2.2.2 Fabrication Process; 2.2.3 Characterization and Analysis of Micro-NanoHierarchical Structures; 2.3 Interaction of Multiscale Structures Based on Silicon; 2.4 Properties of Si-Based Micro-NanoHierarchical Structures; 2.4.1 Anti-reflective Property; 2.4.2 Super-hydrophobic Property.
2.5 ConclusionsReferences; 3 Micro-Nanointegrated Fabrication Technique for Flexible Materials; Abstract ; 3.1 Replication Process and Surface-Energy Control; 3.1.1 Replication Process Based on Silicon Mold; 3.1.2 Controllable Fabrication of Ultra-Low-Surface-Energy Silicon Mold; 3.2 Micro-Nanohierarchical Structures Based on PDMS; 3.2.1 Brief Introduction of PDMS; 3.2.2 Single-Step Fabrication of Micro-Nanohierarchical Structures on PDMS; 3.2.3 Key Factors of Single-Step Replication Process; 3.2.4 Effect of Process Parameters on Surface Properties of PDMS.
3.3 Micro-Nanohierarchical Structures Based on Parylene-C3.3.1 Fabrication and Method; 3.3.2 The Properties of Fabricated MNHS Parylene-C Films; 3.4 The Interaction of Multiscale Structures on Flexible Materials; 3.5 The Surface Modification Based on Post-DRIE Process; 3.5.1 Fluorocarbon Plasma Treatment Based on Post-DRIE Process; 3.5.2 The Mechanism of Enhancing Hydrophobicity by Using Post-DRIE Process; 3.6 Conclusions; References; 4 Flexible Triboelectric Nanogenerators: Principle and Fabrication; Abstract ; 4.1 Working Principle of TENG; 4.2 Design of Flexible Sandwich-Shaped TENG.
4.2.1 Structural Geometry and Surface Profile4.2.2 Theoretical Analysis; 4.2.3 Finite Element Simulation; 4.3 Fabrication of the Sandwich-Shaped TENG; 4.4 Electric Properties Test and Analysis of the Sandwich-Shaped TENG; 4.4.1 Test System and Brief Results; 4.4.2 Frequency Effect of External Force on TENG; 4.4.3 Structural Effect on TENG; 4.4.4 Powering Ability for Practical Applications; 4.5 Conclusions; References; 5 Flexible Triboelectric Nanogenerators: Enhancement and Applications; Abstract ; 5.1 Enhancement of TENG Based on Single-Step Fluorocarbon Plasma Treatment.