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Title
Nanopositioning technologies [electronic resource] : fundamentals and applications / Changhai Ru, Xinyu Liu, Yu Sun, editors.
ISBN
9783319238531 (electronic book)
3319238531 (electronic book)
9783319238524
3319238523
Publication Details
Cham : Springer, ©2016.
Language
English
Description
1 online resource.
Item Number
10.1007/978-3-319-23853-1 doi
Call Number
TK7875
Dewey Decimal Classification
620/.5
620
Summary
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Bibliography, etc. Note
References3 Mechanical Design of High-Speed Nanopositioning Systems; 3.1 Introduction; 3.2 Scanning Probe Microscopy; 3.3 Flexure-Guided Nanopositioner; 3.4 Design Considerations; 3.4.1 Flexure Hinges; 3.4.1.1 Commonly Used Flexure Hinges in Nanopositioning; 3.4.1.2 Boundary Conditions of Flexures; 3.4.1.3 Commonly Used Flexures in MEMS; 3.4.1.4 Finite-Element-Analysis; 3.4.2 Piezoelectric Stack Actuators; 3.4.2.1 Comparison of Piezo-Stack Actuated Nanopositioners; 3.4.2.2 Preloading; 3.4.2.3 Travel Range; 3.4.2.4 Self-Heating; 3.4.2.5 Electrical Considerations; 3.4.3 Material Considerations
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
Available in Other Form
Print version: 9783319238524
1.A review of Stick-Slip Nanopositioning Actuators
2. Piezoelectric Motor Technology
A Review
3. Design of High-speed Nanopositioning Systems
4. Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
5. Electro-magnetic Nano Positioning
6. Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis
7. Tracking Control for Nanopositioning
8. Position Sensors for Nanopositioning
9. MEMS Nanopositioners
10. Control Issues of MEMS nanopositioning devices
11. A Review of Nanomanipulation in Scanning Electron Microscopes
12. Nanopositioning for lithography and data storage.
