Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
2014
TK7871.85 .I584 2014eb
Linked e-resources
Linked Resource
Online Access
Details
Title
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
Meeting Name
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)
ISBN
9783038352426
9783038266266 (electronic book)
9783038266266 (electronic book)
Published
Pfaffikon, Switzerland : TTP, 2014.
Distributor
Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]
Copyright
©2014
Language
English
Description
1 online resource (331 pages) : illustrations.
Call Number
TK7871.85 .I584 2014eb
Dewey Decimal Classification
621.38152
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Source of Description
Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).
Series
Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219.
Linked Resources
Online Access
Record Appears in
Online Resources > Ebooks
All Resources
All Resources