Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Marc J. Madou.
2011
TK7875 .M336 2011
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Title
Fundamentals of microfabrication and nanotechnology. Volume III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / Marc J. Madou.
Author
Edition
Third edition.
ISBN
9781420055160
9781439895245 (electronic book)
9781439895245 (electronic book)
Published
Boca Raton, Florida ; London, [England] ; New York : CRC Press, 2011.
Copyright
©2011
Language
English
Description
1 online resource (642 pages) : illustrations, tables
Call Number
TK7875 .M336 2011
Dewey Decimal Classification
620.5
Bibliography, etc. Note
Includes bibliographical references.
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
Available in Other Form
Print version: Madou, Marc J. Fundamentals of microfabrication and nanotechnology. Volume III. Third edition. Boca Raton, Florida ; London, [England] ; New York : CRC Press, c2011 xiii, 626 pages 9781420055160
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