Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
2007
TK7874 .M196 2007eb
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Title
Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
Author
ISBN
9780470018934
0470018933
9780470727300 (pbk.)
0470727306 (pbk.)
0470018933
9780470727300 (pbk.)
0470727306 (pbk.)
Publication Details
Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
Language
English
Description
xvii, 515 p. : ill. ; 25 cm.
Call Number
TK7874 .M196 2007eb
Dewey Decimal Classification
621.3815/31
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
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