Computational lithography: [electronic resource] /: Xu Ma and Gonzalo R. Arce.

Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.

Ma, Xu, 1983-; Arce, Gonzalo R.

2010

TK7872.M3 M3 2010eb

Formats

Linked Resource

Title

Computational lithography [electronic resource] / Xu Ma and Gonzalo R. Arce.

Author

ISBN

9780470596975
047059697X

Publication Details

Oxford : Wiley-Blackwell, 2010.

Language

English

Description

1 online resource (xv, 226 p.) : ill.

Call Number

TK7872.M3 M3 2010eb

Dewey Decimal Classification

621.381531

Bibliography, etc. Note

Includes bibliographical references and index.

Access Note

Access limited to authorized users.

Added Author

Series

Wiley series in pure and applied optics.

Linked Resources

Record Appears in