Handbook of thin film technology [electronic resource] / Hartmut Frey, H.R. Khan, editors.
Frey, Hartmut, editor.; Khan, H. R., editor.
2015
TA418.9.T45 H35 2015eb
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Title
Handbook of thin film technology [electronic resource] / Hartmut Frey, H.R. Khan, editors.
ISBN
9783642054303 electronic book
3642054307 electronic book
9783642054297
3642054293
DOI
https://doi.org/10.1007/978-3-642-05430-3
Published
Berlin : Springer, 2015.
Language
English
Description
1 online resource.
Item Number
10.1007/978-3-642-05430-3 doi
Call Number
TA418.9.T45 H35 2015eb
Dewey Decimal Classification
621.38152
Distributor No.
11009184
Note
Includes index.
Access Note
Access limited to authorized users.
Source of Description
Description based on print version record.
Added Author
Frey, Hartmut, editor.
Khan, H. R., editor.
Available in Other Form
Handbook of thin film technology
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Applications and developments of thin film technology
Importance of the vacuum technology for thin film coatings
Evaporation in the vacuum
Basic principle of plasma physics
Gaseous phase and surface processes
Coating by cathode sputtering
Plasma treatment methods
Ion beam-supported procedures
Chemical Vapor Deposition (CVD)
Physical basics of modern methods of surface and thin film analysis
Measurements of thin layers during the coating
Measurements of thin layers after terminated coating process
Nanoparticle Films
Optical properties of thin films.

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