Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
2010
TK7875 .H36 2010eb
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Details
Title
Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
Edition
1st ed.
ISBN
9780815515944
0815515944
0815515944
Publication Details
Amsterdam ; Boston : William Andrew/Elsevier, 2010.
Language
English
Description
xxxii, 636 p. : ill.
Call Number
TK7875 .H36 2010eb
Bibliography, etc. Note
Includes bibliographical references and index.
Access Note
Access limited to authorized users.
Added Author
Lindroos, Veikko.
Series
Micro & nano technologies.
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